Green Lithography Using Water-Developable Sugar-Based Negative Resist Materials

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Bibliographic Details
Published inMRS advances Vol. 1; no. 27; pp. 1977 - 1984
Main Authors Takei, Satoshi, Hanabata, Makoto, Sugahara, Kigen, Sugino, Naoto, Kameda, Takao, Fukushima, Jiro
Format Journal Article
LanguageEnglish
Published 01.01.2016
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ISSN:2059-8521
2059-8521
DOI:10.1557/adv.2016.344