Influence of Mo doping on transparent conducting properties of ZnO films prepared by a simplified spray technique

Molybdenum doped zinc oxide films were prepared by simplified spray pyrolysis method at a deposition temperature of 350 °C. Mo doping level in ZnO films were varied from 1 to 4 at.%. X-ray diffraction results reveal that all the films exhibit hexagonal wurtzite structure with preferential orientatio...

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Bibliographic Details
Published inJournal of materials science. Materials in electronics Vol. 26; no. 10; pp. 7649 - 7654
Main Authors Ravichandran, K., Anbazhagan, A., Dineshbabu, N., Ravidhas, C.
Format Journal Article
LanguageEnglish
Published New York Springer US 01.10.2015
Springer Nature B.V
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Summary:Molybdenum doped zinc oxide films were prepared by simplified spray pyrolysis method at a deposition temperature of 350 °C. Mo doping level in ZnO films were varied from 1 to 4 at.%. X-ray diffraction results reveal that all the films exhibit hexagonal wurtzite structure with preferential orientation along the (002) plane. The crystallite size is found to be varied from 29 to 59 nm with the increase in the Mo content. The film with 1 at.% Mo doping has good electrical properties among all doped samples in terms of the carrier concentration (7.5 × 10 19  cm −3 ), charge carrier mobility (18.2 cm 2  V −1  s −1 ), and a minimum resistivity (2.0 × 10 −3  Ω cm). UV–Vis spectrometer results show that all the films are highly transparent in the visible region and the band gap energy of the films varies from 3.19 to 3.14 eV as Mo doping level is increased.
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ISSN:0957-4522
1573-482X
DOI:10.1007/s10854-015-3404-6