Theoretical study of pulsed microwave discharge in nitrogen

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Bibliographic Details
Published inPlasma sources science & technology Vol. 14; no. 4; pp. 751 - 756
Main Authors Bonaventura, Z, Trunec, D, Meško, M, Vašina, P, Kudrle, V
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.11.2005
Institute of Physics
Subjects
Electric discharges
Exact sciences and technology
High-frequency discharges
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Boltzmann equation
Electric discharges
Theoretical study
Electron distribution
Nitrogen
Time dependence
Pulsed discharge
Numerical solution
Diffusion coefficient
Electron energy level
Drift velocity
Microwave discharge
Distribution functions
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/14/4/014