Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applications

A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-...

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Bibliographic Details
Published inReview of scientific instruments Vol. 85; no. 2; p. 024502
Main Authors Wlodarczyk, Krystian L, Bryce, Emma, Schwartz, Noah, Strachan, Mel, Hutson, David, Maier, Robert R J, Atkinson, David, Beard, Steven, Baillie, Tom, Parr-Burman, Phil, Kirk, Katherine, Hand, Duncan P
Format Journal Article
LanguageEnglish
Published United States 01.02.2014
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Summary:A prototype of a scalable and potentially low-cost stacked array piezoelectric deformable mirror (SA-PDM) with 35 active elements is presented in this paper. This prototype is characterized by a 2 μm maximum actuator stroke, a 1.4 μm mirror sag (measured for a 14 mm × 14 mm area of the unpowered SA-PDM), and a ±200 nm hysteresis error. The initial proof of concept experiments described here show that this mirror can be successfully used for shaping a high power laser beam in order to improve laser machining performance. Various beam shapes have been obtained with the SA-PDM and examples of laser machining with the shaped beams are presented.
ISSN:1089-7623
DOI:10.1063/1.4865125