Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems
In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transm...
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Published in | Journal of non-crystalline solids Vol. 354; no. 12-13; pp. 1407 - 1410 |
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Main Authors | , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Amsterdam
Elsevier B.V
15.02.2008
Elsevier |
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Abstract | In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding. |
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AbstractList | In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding. |
Author | Li, Changjiu Huang, Yourong Gao, Xiping Gu, Zhenan Cui, Zhu |
Author_xml | – sequence: 1 givenname: Yourong surname: Huang fullname: Huang, Yourong email: youronghuang@263.net – sequence: 2 givenname: Zhu surname: Cui fullname: Cui, Zhu – sequence: 3 givenname: Xiping surname: Gao fullname: Gao, Xiping – sequence: 4 givenname: Changjiu surname: Li fullname: Li, Changjiu – sequence: 5 givenname: Zhenan surname: Gu fullname: Gu, Zhenan |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20295579$$DView record in Pascal Francis |
BookMark | eNqFkEtPAyEUhYmpibX6H9i4nJHHdAaW2vhKGrvRNaEMtExmoIGppht_u7ep0aVsLrn3fJfDuUSTEINFCFNSUkLr267soGPSIce-ZIQ0JWElkfwMTaloeFEJyiZoSghjBYf-BbrMuSNwGi6m6Gvpx63fD1j3-8GHmH3vjR4t3vQ658LYpAdvsIlh1D74sMGvmq2wiwn38bMY7bADybhPFusQW5CuY2iPOh8wkCna3poxxQCjwZqthovucT5kYPMVOne6z_b6p87Q--PD2-K5WK6eXhZ3y8LwSowFE5IYRmrp6rWxrazrSjYVXzfc1dpRxnhLWicF5VQYUZGWCiZlYzl1c9YYy2dInPaCoZyTdWqX_KDTQVGijjmqTv3lqI45KsIU5AXozQnd6QzOXdLB-PzLM8LkfN5I0N2fdBb-8eFtUtl4G8CuT5CAaqP__7FvZoaTXQ |
CODEN | JNCSBJ |
CitedBy_id | crossref_primary_10_1016_j_jallcom_2010_08_011 crossref_primary_10_1016_j_jnoncrysol_2011_11_003 crossref_primary_10_1063_1_3110202 crossref_primary_10_1016_j_ceramint_2020_04_048 crossref_primary_10_1111_jace_14388 crossref_primary_10_1007_s00170_020_06018_x crossref_primary_10_1016_j_cej_2023_144719 crossref_primary_10_1016_j_ceramint_2020_05_202 crossref_primary_10_1016_j_matchemphys_2010_03_083 crossref_primary_10_1163_016942410X526794 crossref_primary_10_4028_www_scientific_net_KEM_562_565_809 crossref_primary_10_1063_1_3277117 crossref_primary_10_1016_j_ceramint_2018_03_140 crossref_primary_10_1016_j_ceramint_2023_09_037 crossref_primary_10_2320_jinstmet_73_110 |
Cites_doi | 10.1016/S0924-4247(97)01659-2 10.1016/0924-4247(90)87060-V |
ContentType | Journal Article Conference Proceeding |
Copyright | 2007 Elsevier B.V. 2008 INIST-CNRS |
Copyright_xml | – notice: 2007 Elsevier B.V. – notice: 2008 INIST-CNRS |
DBID | IQODW AAYXX CITATION |
DOI | 10.1016/j.jnoncrysol.2007.02.093 |
DatabaseName | Pascal-Francis CrossRef |
DatabaseTitle | CrossRef |
DatabaseTitleList | |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering Chemistry Physics |
EISSN | 1873-4812 |
EndPage | 1410 |
ExternalDocumentID | 10_1016_j_jnoncrysol_2007_02_093 20295579 S0022309307012276 |
GroupedDBID | --K --M -~X .~1 0R~ 1B1 1~. 1~5 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAXUO ABFNM ABJNI ABMAC ABXDB ABXRA ABYKQ ACDAQ ACGFS ACNNM ACRLP ADBBV ADEZE ADIYS ADMUD AEBSH AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FIRID FNPLU FYGXN G-Q HZ~ IHE J1W KOM M24 M41 MAGPM MO0 N9A O-L O9- OAUVE OZT P-9 P2P PC. Q38 RIG RNS ROL RPZ SDF SDG SDP SES SPC SPCBC SPD SSM SSZ T5K TWZ XPP ZMT ~02 ~G- 29L 6TJ AAQXK ABPIF ABPTK AI. ASPBG AVWKF AZFZN FEDTE FGOYB G-2 GBLVA IQODW P-8 R2- SEW SMS VH1 WUQ 0SF AAXKI AAYXX AFJKZ AKRWK CITATION HVGLF |
ID | FETCH-LOGICAL-c348t-2890c2069f6bced96649743b73f6af1223d0df981318c840d182997e31f527ce3 |
IEDL.DBID | AIKHN |
ISSN | 0022-3093 |
IngestDate | Thu Sep 26 16:56:01 EDT 2024 Sun Oct 22 16:06:30 EDT 2023 Fri Feb 23 02:32:03 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 12-13 |
Keywords | Thermal properties 61.72 Microcrystallinity Conductivity 82.45 87.59.L Glass-ceramics Microstructure Transmission electron microscopy 61.72; 82.45; 87.59.L Glass-ceramics; Conductivity; Microstructure; Microcrystallinity; Thermal properties Aluminosilicate glass XRD Dispersive spectrometry Glass ceramics Bonding Heat treatments |
Language | English |
License | CC BY 4.0 |
LinkModel | DirectLink |
MeetingName | Proceedings of the 2005 International Conference on Glass (in conjunction with the Annual Meeting of the International Commission on Glass). Shanghai, China, 10-14 April 2005 |
MergedId | FETCHMERGED-LOGICAL-c348t-2890c2069f6bced96649743b73f6af1223d0df981318c840d182997e31f527ce3 |
PageCount | 4 |
ParticipantIDs | crossref_primary_10_1016_j_jnoncrysol_2007_02_093 pascalfrancis_primary_20295579 elsevier_sciencedirect_doi_10_1016_j_jnoncrysol_2007_02_093 |
PublicationCentury | 2000 |
PublicationDate | 2008-02-15 |
PublicationDateYYYYMMDD | 2008-02-15 |
PublicationDate_xml | – month: 02 year: 2008 text: 2008-02-15 day: 15 |
PublicationDecade | 2000 |
PublicationPlace | Amsterdam |
PublicationPlace_xml | – name: Amsterdam |
PublicationTitle | Journal of non-crystalline solids |
PublicationYear | 2008 |
Publisher | Elsevier B.V Elsevier |
Publisher_xml | – name: Elsevier B.V – name: Elsevier |
References | Barth (bib1) 1990; A21–A23 Shoji, Kikuchi, Torigoe (bib2) 1998; 64 Shoji (10.1016/j.jnoncrysol.2007.02.093_bib2) 1998; 64 Barth (10.1016/j.jnoncrysol.2007.02.093_bib1) 1990; A21–A23 |
References_xml | – volume: A21–A23 start-page: 919 year: 1990 ident: bib1 publication-title: Sensor Actuator contributor: fullname: Barth – volume: 64 start-page: 95 year: 1998 ident: bib2 publication-title: Sensor Actuator A contributor: fullname: Torigoe – volume: 64 start-page: 95 year: 1998 ident: 10.1016/j.jnoncrysol.2007.02.093_bib2 publication-title: Sensor Actuator A doi: 10.1016/S0924-4247(97)01659-2 contributor: fullname: Shoji – volume: A21–A23 start-page: 919 year: 1990 ident: 10.1016/j.jnoncrysol.2007.02.093_bib1 publication-title: Sensor Actuator doi: 10.1016/0924-4247(90)87060-V contributor: fullname: Barth |
SSID | ssj0000738 |
Score | 1.994631 |
Snippet | In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a... |
SourceID | crossref pascalfrancis elsevier |
SourceType | Aggregation Database Index Database Publisher |
StartPage | 1407 |
SubjectTerms | Conductivity Cross-disciplinary physics: materials science; rheology Exact sciences and technology Glass-ceramics Glasses (including metallic glasses) Materials science Microcrystallinity Microstructure Physics Specific materials Thermal properties |
Title | Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems |
URI | https://dx.doi.org/10.1016/j.jnoncrysol.2007.02.093 |
Volume | 354 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1La9wwEB6SDaUtpbTblqSPRYdeldh6WBY9haVh-9peGsjNSLJEHboPdjeEXvLbO1rJ2eRQKPRqLNvMDPPA33wfwHvlmJDKe9rWoaIiKE9rq1paWBm8M15zEReFv02rybn4fCEv9mDc78JEWGXO_Smnb7N1vnKSrXmy7Lq444ulDQdyDNqSMVXtwwGWIyEGcHD66ctkukvIite3pOF4IAN6EszrEqdst_qNjs58huy40PxvVerJ0qzRdiGJXtypRGfP4GluIclp-srnsOfnQ3g47pXbhvD4DsngEB5sQZ5u_QJuvnabn93VjBjMSN18se7SBhzZttDU-VUUpycRvZ50I8jUsO8E21rya3FNI4tVpmAmZr5o8Va72C7FkG5OZhHZtxPVITMfd4pjCJDEFr1-CednH3-MJzTrL1DHRb2h8R-kY0WlQ2XRHTgYCZw-uFU8VCagzXlbtEHXJeYFh4Nii7OK1srzMkimnOevYIDW9YdAtJPGVyoYPCskN9YIK2pbV7Vtg_fiCMre3s0y0Ww0Pf7sstn5KKpmqqZgDfroCD70jmnuhUyD1eAfTo_u-fL2taxgWkqlX__X49_Ao4QsYbSUb2GwWV35d9i-bOwI9o9vylEO0j--gfTY |
link.rule.ids | 310,311,315,786,790,795,796,4521,23958,23959,24144,25170,27955,27956,45618,45712 |
linkProvider | Elsevier |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LaxRBEC5iRKIE0VUxMcY-eO1kph_T0-QkS8Kqm_WSQG5Dd083TnAf7G4QL_ntVk_PZJODEPA69DyoKurBfPV9AJ-VY0Iq72ldhoKKoDwtrappZmXwznjNRVwUPp8Uo0vx7UpebcGw34WJsMou96ec3mbr7spxZ83jRdPEHV8sbTiQY9DmjKniCTyN3UDEdR3dbnAeGMPlHWU4Hu_gPAnkdY0ztlv-QTd3bIbsKNP8XzVqd2FWaLmQJC_u1aGzV_CyayDJl_SNr2HLzwawM-x12wbw4h7F4ACetRBPt3oDt-Nm_bO5mRKD-aiZzVdN2n8jbQNNnV9GaXoSsetJNYJMDPtBsKklv-a_aeSw6giYiZnNazxq5-1KDGlmZBpxfRtJHTL1caM4BgBJXNGrt3B5dnoxHNFOfYE6Lso1jX8gHcsKHQqLzsCxSODswa3ioTABLc7rrA66zDErOBwTa5xUtFae50Ey5Tx_B9toXf8eiHbS-EIFg_cKyY01worSlkVp6-C92IO8t3e1SCQbVY8-u642PoqamarKWIU-2oOT3jHVg4CpsBY84u7DB768ey3LmJZS6f3_evwn2BldnI-r8dfJ9w_wPGFMGM3lAWyvlzf-IzYya3vYBupf8_z1rQ |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=proceeding&rft.title=Journal+of+non-crystalline+solids&rft.atitle=Lithium+aluminosilicate+glass-ceramic+containing+Na2O+for+low-temperature+anodic+bonding+in+microelectronic+mechanical+systems&rft.au=YOURONG+HUANG&rft.au=ZHU+CUI&rft.au=XIPING+GAO&rft.au=CHANGJIU+LI&rft.date=2008-02-15&rft.pub=Elsevier&rft.issn=0022-3093&rft.eissn=1873-4812&rft.volume=354&rft.issue=12-13&rft.spage=1407&rft.epage=1410&rft_id=info:doi/10.1016%2Fj.jnoncrysol.2007.02.093&rft.externalDBID=n%2Fa&rft.externalDocID=20295579 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0022-3093&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0022-3093&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0022-3093&client=summon |