Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems

• Published in: Journal of non-crystalline solids Vol. 354; no. 12-13; pp. 1407 - 1410
• Main Authors: Huang, Yourong, Cui, Zhu, Gao, Xiping, Li, Changjiu, Gu, Zhenan
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 15.02.2008; Elsevier
• Subjects: Conductivity; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Glass-ceramics; Glasses (including metallic glasses); Materials science; Microcrystallinity; Microstructure; Physics; Specific materials; Thermal properties; Thermal properties; 61.72; Microcrystallinity; Conductivity; 82.45; 87.59.L; Glass-ceramics; Microstructure; Transmission electron microscopy; 61.72; 82.45; 87.59.L; Glass-ceramics; Conductivity; Microstructure; Microcrystallinity; Thermal properties; Aluminosilicate glass; XRD; Dispersive spectrometry; Glass ceramics; Bonding; Heat treatments
• ISSN: 0022-3093; 1873-4812
• DOI: 10.1016/j.jnoncrysol.2007.02.093

In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding.