Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems
In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transm...
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Published in | Journal of non-crystalline solids Vol. 354; no. 12-13; pp. 1407 - 1410 |
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Main Authors | , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
Amsterdam
Elsevier B.V
15.02.2008
Elsevier |
Subjects | |
Online Access | Get full text |
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Summary: | In this study, one kind of lithium aluminosilicate-β-quartz glass-ceramic containing Na2O has been chosen, which can be used for low-temperature bonding with a higher bonding rate for the manufacture of microelectronic mechanical systems. The microstructure of the glass-ceramic is analyzed by transmission electron microscopy, high resolution transmission electron microscopy, selected-area diffraction, energy dispersive spectrometry and X-ray diffraction. The influence of the heat treatment process of the glass on the properties and the microstructure of the glass-ceramics is discussed. The microstructure of the glass-ceramic has the continuous glassy region with higher alkali metal ion content, which benefits the low-temperature anodic bonding. |
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ISSN: | 0022-3093 1873-4812 |
DOI: | 10.1016/j.jnoncrysol.2007.02.093 |