Sub-0.25 micron gate-like heterojunction doped-channel FETs with a controllable notch-angle V-gate
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Published in | Semiconductor science and technology Vol. 19; no. 3; pp. 384 - 388 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.03.2004
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/19/3/015 |