Micro- and nanoelectric-discharge machining

• Published in: Journal of materials processing technology Vol. 149; no. 1; pp. 263 - 265
• Main Authors: Beltrami, Ivano, Joseph, Cédric, Clavel, Reymond, Bacher, Jean-Philippe, Bottinelli, Stefano
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 10.06.2004
• Subjects: 3D micro-structurisation; Electro discharge machining; Micro-EDM; MicroEDM; Microfactory; Nanofactory; Nanotechnology; Rapid prototyping; Nanofactory; 3D micro-structurisation; Micro-EDM; MicroEDM; Rapid prototyping; Electro discharge machining; Nanotechnology; Microfactory
• ISSN: 0924-0136
• DOI: 10.1016/j.jmatprotec.2004.03.002

New solutions are needed for manufacturing small and very precise components and micro-systems for the watch industry, for micro-optics (telecommunication), for medicine (processing biocompatible materials, medical implants, tools for ophthalmic surgery and for living cells manipulations) and even the chemical industry (micro-reactors). A small, very precise EDM machine called Delta 3 was developed at EPFL and connected to a new generation EDM-generator from AGIE. It has a working volume of 8 mm×8 mm×8 mm, a high resolution (5 nm) and a high bandwidth dynamic (600 Hz). These performances are made possible by using a parallel kinematics based on flexure joints, thus completely eliminating friction, wear and backlash. Three linear electromagnetic motors actuate the machine. With the special features of the Delta 3 one can explore new strategies for micro-erosion. The high dynamical behavior of the machine allows better flushing conditions and better gap control. With the improved precision we expect to erode small pieces with a precision of 100 nm, which means an order of magnitude better than the actual state of the art EDM machines on the market. The small overall size of the Delta 3 makes it ideal to be used in a micro-factory.