In situ optical reflectometry applied to growth of indium gallium nitride epilayers and multi-quantum well structures
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Published in | Semiconductor science and technology Vol. 18; no. 4; pp. 212 - 218 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
01.04.2003
Institute of Physics |
Subjects | |
Online Access | Get full text |
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ISSN: | 0268-1242 1361-6641 |
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DOI: | 10.1088/0268-1242/18/4/304 |