Refractive-index-adjustment of SiO2-GeO2 films deposited by radio frequency magnetron sputtering

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Bibliographic Details
Published inApplied surface science Vol. 142; no. 1-4; pp. 58 - 62
Main Authors KASHIMURA, S, ISLAM, M. R, TAKEUCHI, M, HONGO, A, OHIRA, K, IMOTO, K, KUMA, S
Format Conference Proceeding Journal Article
LanguageEnglish
Published Amsterdam Elsevier Science 01.04.1999
Subjects
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of bulk materials and thin films
Physics
Magnetrons
Annealing
Inorganic compounds
Silicon oxides
Ternary compounds
Refractive index
Thick films
Experimental study
Germanium oxides
Sputtering
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ISSN:0169-4332
1873-5584
DOI:10.1016/s0169-4332(98)00631-x