High-resolution soft lithography of thin film resists enabling nanoscopic pattern transfer

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Bibliographic Details
Published inSoft matter Vol. 4; no. 1; pp. 168 - 176
Main Authors Moran, Isaac W., Cheng, Dalton F., Jhaveri, Sarav B., Carter, Kenneth R.
Format Journal Article
LanguageEnglish
Published 01.01.2008
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Bibliography:ObjectType-Article-1
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content type line 23
ISSN:1744-683X
1744-6848
DOI:10.1039/B711506G