Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency（RF） sources.Particle-in-cell/Monte Carlo（PIC/MC） simulation showed th...

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Bibliographic Details
Published inPlasma science & technology Vol. 18; no. 2; pp. 143 - 146
Main Author 王虹宇 姜巍 孙鹏 赵双云 李阳
Format Journal Article
LanguageEnglish
Published 01.02.2016
Subjects
Computer simulation
Coupling
Discharge
Electrodes
Joining
Monte Carlo methods
Particle in cell technique
Radio frequencies
分子组织
注射剂
等离子体
超声波
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ISSN1009-0630
DOI10.1088/1009-0630/18/2/08

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Summary:We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency（RF） sources.Particle-in-cell/Monte Carlo（PIC/MC） simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly.
Bibliography:WANG Hongyu , JIANG Wei, SUN Peng, ZHAO Shuangyun , LI gang （ 1School of Physics Science and Technology, Anshan Normal University, Anshan 114005, China 2School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China）
CCP dual frequency coupling PIC/MC
We analyzed perpendicularly configured dual-frequency（DF） capacitively coupled plasmas（CCP）.In this configuration,two pairs of electrodes are arranged oppositely,and the discharging is perpendicularly driven by two radio frequency（RF） sources.Particle-in-cell/Monte Carlo（PIC/MC） simulation showed that the configuration had some advantages as this configuration eliminated some dual frequency coupling effects.Some variation and potential application of the discharging configuration is discussed briefly.
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ISSN:1009-0630
DOI:10.1088/1009-0630/18/2/08