How will physics be involved in silicon microelectronics

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Bibliographic Details
Published inJournal of physics. D, Applied physics Vol. 29; no. 3; pp. 487 - 500
Main Authors Kamarinos, Georges, Felix, Pierre
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 14.03.1996
Institute of Physics
Subjects
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Microelectronic fabrication
Silicon
Review
Reliability
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ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/29/3/001