Microswitches and microrelays with a view toward microwave applications

In this paper, we discuss our work on surface micromachined microswitches and microrelays that are based on electroplated materials. We have successfully fabricated devices with lifetimes exceeding 107 cycles cold switched at current levels exceeding 10 ma. Contact resistance is consistently below o...

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Bibliographic Details
Published inInternational journal of RF and microwave computer-aided engineering Vol. 9; no. 4; pp. 338 - 347
Main Authors Zavracky, Paul M., McGruer, Nicol E., Morrison, Richard H., Potter, David
Format Journal Article
LanguageEnglish
Published New York John Wiley & Sons, Inc 01.07.1999
Subjects
MEMs
micromachined
microrelay
microswitch
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Summary:In this paper, we discuss our work on surface micromachined microswitches and microrelays that are based on electroplated materials. We have successfully fabricated devices with lifetimes exceeding 107 cycles cold switched at current levels exceeding 10 ma. Contact resistance is consistently below one ohm for a single contact. Multiple contact devices have much lower effective contact resistance. ©1999 John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 338–347, 1999.
Bibliography:istex:FB4DB99FEA66EC4AFED0B2EC0B1BF29D23C3C07C
ark:/67375/WNG-18L6VC3X-B
ArticleID:MMCE5
ISSN:1096-4290
1099-047X
DOI:10.1002/(SICI)1099-047X(199907)9:4<338::AID-MMCE5>3.0.CO;2-Q