Simple experimental and analytical methods to estimate the power coupling efficiency in plasma discharges

• Published in: Contributions to plasma physics (1988) Vol. 63; no. 8
• Main Authors: Delacqua, L. Colina, Ouaras, K., Redolfi, M., Orlac'H, J.‐M., Silva, F., Bonnin, X., Hassouni, K., Lombardi, G.
• Format: Journal Article
• Language: English
• Published: Weinheim WILEY‐VCH Verlag GmbH & Co. KGaA 01.09.2023; Wiley Subscription Services, Inc; Wiley-VCH Verlag
• Subjects: Analytical methods; Convection; Coupling; Cyclotron resonance; effective absorbed plasma power; Electric discharges; Electron cyclotron resonance; Engineering Sciences; Experimental methods; microwave plasma; Microwave plasmas; Physics; power coupling efficiency; Radiation; Thermal management; puissance effective; effective absorbed plasma power; power coupling efficiency; microwave plasma; plasma micro-onde
• ISSN: 0863-1042; 1521-3986
• DOI: 10.1002/ctpp.202300045

A simple experimental method to estimate the power effectively absorbed by a plasma is presented. It relies on a thermal management study that is applied to the whole discharge system, providing the energy released by the plasma and lost by convection and radiation at the reactor walls. The methodology is illustrated in the case of H2 Electron Cyclotron Resonance microwave plasma. Nevertheless, this method can be extended to a variety of electrical discharge or feed gases. Using this method, an experimental coupling efficiency of ∼22 ± ∼8% was derived. In comparison, an analytical balance of the plasma power absorption yields a theoretical coupling efficiency of ∼28 ± ∼9%.