Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering

Nitrogen doping of silver oxide （AgxO） film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron react...

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Published inChinese physics B Vol. 21; no. 6; pp. 360 - 363
Main Author 赵孟珂 梁艳 郜小勇 陈超 陈先梅 赵显伟 赵建伟 刘凤娟 黄海琴 胡佐富 张希清
Format Journal Article
LanguageEnglish
Published 01.06.2012
Subjects
Deposition
Diffraction
Diodes
Evolution
Optical properties
Reflectivity
Silver oxides
Sputtering
Transmissivity
X-射线衍射法
光学性质
化学计量
反应溅射沉积
氧化银薄膜
演变
直流磁控反应溅射
相结构
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ISSN1674-1056
2058-3834
1741-4199
DOI10.1088/1674-1056/21/6/066101

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Summary:Nitrogen doping of silver oxide （AgxO） film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios （FRs） of nitrogen to 02. Evolutions of the structure, the refiectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular refiectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.
Bibliography:Nitrogen doping of silver oxide （AgxO） film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios （FRs） of nitrogen to 02. Evolutions of the structure, the refiectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular refiectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.
Zhao Meng-Ke, Liang Yan ,Gao Xiao-Yong, Chen Chao, Chen Xinn-Mei,Zhuo Xian-Wei（ a） Key Laboratory of Material Physics （Ministry of Education）, School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China b） College of Information Science and Engineering, Henan University of Technology, Zhengzhou 450001, China
11-5639/O4
silver oxide film, nitrogen doping, optical properties, magnetron reactive sputtering
ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 23
ISSN:1674-1056
2058-3834
1741-4199
DOI:10.1088/1674-1056/21/6/066101