Numerical investigation of multiple stationary and time-periodic flow regimes in vertical rotating disc CVD reactors

• Published in: Journal of crystal growth Vol. 432; pp. 152 - 159
• Main Authors: Gakis, G.P., Koronaki, E.D., Boudouvis, A.G.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 15.12.2015
• Subjects: A1. Computer simulation; A3. Chemical vapor deposition processes; Buoyancy; Computation; Disks; Mathematical models; Multiple fluid flows; Parameter continuation; Plug flow; Reactors; Rotating; A1. Computer simulation; Parameter continuation; A3. Chemical vapor deposition processes; Multiple fluid flows
• ISSN: 0022-0248; 1873-5002
• DOI: 10.1016/j.jcrysgro.2015.09.026

The vertical rotating disc CVD reactor problem is revisited with a computational framework that allows systematic parameter continuation along branches of flow regimes over various operating parameter values. The commercial CFD code Fluent is used, enhanced with a home-made module and by appropriate initialization, a P–ω diagram is mapped out. In addition to the well known result where boyancy-induced and rotation-induced regimes exist for low and high rotation rates respectively along with a favorable for film uniformity plug flow regime in between, interesting new flow regimes are computed: Stable time-periodic buoyancy induced flows are found as well as stationary ones. Periodic buoyancy induced flows co-exist with stationary plug flow regimes over a range of ω for pressures higher than 200Torr. A regime of stationary flows where the effect of buoyancy and rotation is combined is computed at pressures higher than 350Torr and it shown to co-exist with typical rotation induced flows. •We study the flow in a rotating disc CVD reactor for various Pressures/rotation rates.•Numerical Investigation with commercial CFD code augmented with home-made module.•Stable time-periodic flows emerge at Hopf point from plug flow regimes.•Multiple stable stationary and periodic solutions exist for the same parameter values.•Flows with combined buoyancy/rotation induced recirculation are found.