Numerical investigation of multiple stationary and time-periodic flow regimes in vertical rotating disc CVD reactors
The vertical rotating disc CVD reactor problem is revisited with a computational framework that allows systematic parameter continuation along branches of flow regimes over various operating parameter values. The commercial CFD code Fluent is used, enhanced with a home-made module and by appropriate...
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Published in | Journal of crystal growth Vol. 432; pp. 152 - 159 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Elsevier B.V
15.12.2015
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Subjects | |
Online Access | Get full text |
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Summary: | The vertical rotating disc CVD reactor problem is revisited with a computational framework that allows systematic parameter continuation along branches of flow regimes over various operating parameter values. The commercial CFD code Fluent is used, enhanced with a home-made module and by appropriate initialization, a P–ω diagram is mapped out. In addition to the well known result where boyancy-induced and rotation-induced regimes exist for low and high rotation rates respectively along with a favorable for film uniformity plug flow regime in between, interesting new flow regimes are computed: Stable time-periodic buoyancy induced flows are found as well as stationary ones. Periodic buoyancy induced flows co-exist with stationary plug flow regimes over a range of ω for pressures higher than 200Torr. A regime of stationary flows where the effect of buoyancy and rotation is combined is computed at pressures higher than 350Torr and it shown to co-exist with typical rotation induced flows.
•We study the flow in a rotating disc CVD reactor for various Pressures/rotation rates.•Numerical Investigation with commercial CFD code augmented with home-made module.•Stable time-periodic flows emerge at Hopf point from plug flow regimes.•Multiple stable stationary and periodic solutions exist for the same parameter values.•Flows with combined buoyancy/rotation induced recirculation are found. |
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Bibliography: | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/j.jcrysgro.2015.09.026 |