UV-assisted deposition of TEOS SiO2 films using the spin-coating method

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Bibliographic Details
Published inApplied surface science Vol. 79-80; no. 1-4; pp. 332 - 337
Main Authors KINASHI, K, NIWANO, M, MIYAMOTO, N, HONMA, K
Format Conference Proceeding Journal Article
LanguageEnglish
Published Amsterdam Elsevier Science 01.05.1994
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Physics
Spin-on coating
Inorganic compounds
Infrared spectra
Experimental study
Silicon oxides
Ultraviolet spectra
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ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(94)90432-4