Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method

• Published in: Materials science--Poland Vol. 31; no. 3; pp. 476 - 483
• Main Authors: Konefał-Góral, Jadwiga, Małek, Anna, Kluska, Stanisława, Jastrzębski, Witold, Zimowski, Sławomir, Jonas, Stanisława, Lis, Jerzy
• Format: Journal Article
• Language: English
• Published: Vienna Springer Vienna 01.08.2013; Versita
• Subjects: Chemistry and Materials Science; Materials Science; PACVD; Research Article; silicon carbonitride layers; tribology; PACVD; tribology; silicon carbonitride layers
• ISSN: 2083-1331; 2083-134X
• DOI: 10.2478/s13536-013-0127-3

This work reports the results concerning formation and tribological properties of SiC x N y (H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiC x N y (H) layers on titanium were deposited with application of MWCVD (2.45 GHz, 2 kW). The layers on polyurethane were deposited using RFCVD (13.56 MHz, 400 W). Good adhesion between the SiC x N y (H) layers and polymeric foil was achieved by formation of a transitional C:N:H layer and incorporating Si gradient into the structure of the SiC x N y (H) layer. The chemical composition of the layers was tailored by precise control of the gaseous precursors ratios: [SiH 4 ]/[NH 3 ], [SIH 4 ]/[NH 3 ]/[CH 4 ], [SiH 4 ]/[CH 4 ] or [SiH 4 ]/[N 2 ]/[CH 4 ]. The structure and chemical composition of the obtained layers were subjected to further studies (FTIR, SEM/EDS). The roughness, friction coefficient and wear resistance were also measured. The results show that SiC x N y (H) layers offer attractive tribological properties which make them good candidates for various applications, including biomedical devices.