Silicon carbonitride layers deposited on titanium and polyurethane by PACVD method
This work reports the results concerning formation and tribological properties of SiC x N y (H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiC x N y (H) layers on titanium were deposited with application of MWCVD (2.45 GHz,...
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Published in | Materials science--Poland Vol. 31; no. 3; pp. 476 - 483 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
Vienna
Springer Vienna
01.08.2013
Versita |
Subjects | |
Online Access | Get full text |
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Summary: | This work reports the results concerning formation and tribological properties of SiC
x
N
y
(H) layers deposited on Ti Grade 2 and polyurethane foil. Depending on the substrate, two variants of PACVD were used. The SiC
x
N
y
(H) layers on titanium were deposited with application of MWCVD (2.45 GHz, 2 kW). The layers on polyurethane were deposited using RFCVD (13.56 MHz, 400 W). Good adhesion between the SiC
x
N
y
(H) layers and polymeric foil was achieved by formation of a transitional C:N:H layer and incorporating Si gradient into the structure of the SiC
x
N
y
(H) layer. The chemical composition of the layers was tailored by precise control of the gaseous precursors ratios: [SiH
4
]/[NH
3
], [SIH
4
]/[NH
3
]/[CH
4
], [SiH
4
]/[CH
4
] or [SiH
4
]/[N
2
]/[CH
4
]. The structure and chemical composition of the obtained layers were subjected to further studies (FTIR, SEM/EDS). The roughness, friction coefficient and wear resistance were also measured. The results show that SiC
x
N
y
(H) layers offer attractive tribological properties which make them good candidates for various applications, including biomedical devices. |
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ISSN: | 2083-1331 2083-134X |
DOI: | 10.2478/s13536-013-0127-3 |