Elemental composition and structural properties of thin rf sputtered Ta2O5 layers

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Bibliographic Details
Published inVacuum Vol. 46; no. 8-10; pp. 889 - 891
Main Authors ATANASSOVA, E, DIMITROVA, T, KOPRINAROVA, J
Format Conference Proceeding Journal Article
LanguageEnglish
Published Oxford Elsevier 01.08.1995
Subjects
Composition and phase identification
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Physics
Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Inorganic compounds
Transition element compounds
Tantalum oxides
Binary compounds
Experimental study
Photoelectron spectroscopy
AES
Characterization
Thin films
Chemical bonds
X radiation
Chemical composition
Thermal annealing
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ISSN:0042-207X
1879-2715
DOI:10.1016/0042-207x(95)00065-8