Low-coherence interferometry as a tool for monitoring laser micro- and nanoprocessing of diamond surfaces

• Published in: Quantum electronics (Woodbury, N.Y.) Vol. 47; no. 11; pp. 1012 - 1016
• Main Authors: Kononenko, V.V., Bushuev, E.V., Zavedeev, E.V., Volkov, P.V., Luk'yanov, A.Yu, Konov, V.I.
• Format: Journal Article
• Language: English
• Published: Bristol Kvantovaya Elektronika, Turpion Ltd and IOP Publishing 01.12.2017; IOP Publishing
• Subjects: ABLATION; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; Crystals; diamond; Diamond tools; DIAMONDS; ELECTROMAGNETIC PULSES; ETCHING; Excimer lasers; Excimers; INTERFEROMETRY; KRYPTON FLUORIDE LASERS; Laser ablation; Laser etching; laser nanoablation; Laser processing; Low coherence interferometry; MONITORING; MONOCRYSTALS; Optical thickness; SAPPHIRE; Single crystals
• DOI: 10.1070/QEL16510
• ISSN: 1063-7818

We have demonstrated the possibility of using low-coherence tandem optical interferometry for monitoring the local laser processing of diamond surfaces. Noncontact measurements of the optical thickness of single-crystal diamond plates were performed directly during the exposure of the surface to repetitive intense laser pulses. We investigated the dynamics of the thinning of a single crystal in two radically different regimes of laser etching: ablation (KrF excimer laser, λ = 248 nm, τ = 20 ns) and nanoablation (Ti : sapphire laser, λ = 266 nm, τ = 100 fs).