Low-coherence interferometry as a tool for monitoring laser micro- and nanoprocessing of diamond surfaces

We have demonstrated the possibility of using low-coherence tandem optical interferometry for monitoring the local laser processing of diamond surfaces. Noncontact measurements of the optical thickness of single-crystal diamond plates were performed directly during the exposure of the surface to rep...

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Bibliographic Details
Published inQuantum electronics (Woodbury, N.Y.) Vol. 47; no. 11; pp. 1012 - 1016
Main Authors Kononenko, V.V., Bushuev, E.V., Zavedeev, E.V., Volkov, P.V., Luk'yanov, A.Yu, Konov, V.I.
Format Journal Article
LanguageEnglish
Published Bristol Kvantovaya Elektronika, Turpion Ltd and IOP Publishing 01.12.2017
IOP Publishing
Subjects
ABLATION
CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Crystals
diamond
Diamond tools
DIAMONDS
ELECTROMAGNETIC PULSES
ETCHING
Excimer lasers
Excimers
INTERFEROMETRY
KRYPTON FLUORIDE LASERS
Laser ablation
Laser etching
laser nanoablation
Laser processing
Low coherence interferometry
MONITORING
MONOCRYSTALS
Optical thickness
SAPPHIRE
Single crystals
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Summary:We have demonstrated the possibility of using low-coherence tandem optical interferometry for monitoring the local laser processing of diamond surfaces. Noncontact measurements of the optical thickness of single-crystal diamond plates were performed directly during the exposure of the surface to repetitive intense laser pulses. We investigated the dynamics of the thinning of a single crystal in two radically different regimes of laser etching: ablation (KrF excimer laser, λ = 248 nm, τ = 20 ns) and nanoablation (Ti : sapphire laser, λ = 266 nm, τ = 100 fs).
ISSN:1063-7818
1468-4799
DOI:10.1070/QEL16510