Design and performance test of a two-axis fast steering mirror driven by piezoelectric actuators

A novel design of a two-axis fast steering mirror（FSM） with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is abou...

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Bibliographic Details
Published inOptoelectronics letters Vol. 12; no. 5; pp. 333 - 336
Main Author 方楚 郭劲 杨国庆 姜振华 徐新行 王挺峰
Format Journal Article
LanguageEnglish
Published Tianjin Tianjin University of Technology 01.09.2016
Springer Nature B.V
Subjects
Laser beams
Lasers
Mechanical properties
Optical Devices
Optics
Performance tests
Photonics
Physics
Physics and Astronomy
Piezoelectric actuators
Steering
光栅编码器
共振频率
压电致动器
反射镜
机械性能测试
机械设计
轴
驱动
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Summary:A novel design of a two-axis fast steering mirror（FSM） with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
Bibliography:mirror piezoelectric grating steering encoder requirement scanner absolute elliptical inertia
12-1370/TN
A novel design of a two-axis fast steering mirror（FSM） with piezoelectric actuators is proposed for incoherent laser beam combination. The mechanical performance of the FSM is tested. The results show that the tilting range of the mirror is about 4 mrad, and the 1st-order resonance frequency is about 250 Hz. A self-designed grating encoder is taken as the sensor, which ensures the optimal precision of 10 μrad. The novel mechanical design can meet the requirement of engineering in incoherent laser beam combination.
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ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-016-6147-6