Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios
Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microsc...
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| Published in | Rare metals Vol. 36; no. 9; pp. 753 - 757 |
|---|---|
| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
Beijing
Nonferrous Metals Society of China
01.09.2017
Springer Nature B.V |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1001-0521 1867-7185 |
| DOI | 10.1007/s12598-015-0583-5 |
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| Abstract | Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18. |
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| AbstractList | Zinc tin oxide (ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition (MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope (SEM), X-ray diffraction (XRD) and ultraviolet–visible (UV–Vis) spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11:18, the intensity of Zn
2
SnO
4
peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm. Measured by UV–Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80 % in the wavelength range of 400–1000 nm when the Sn/Zn ratio is 7:18. Zinc tin oxide (ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition (MOCVD). The crystallization, microstructure and optical properties were investigated by scanning electronic microscope (SEM), X-ray diffraction (XRD) and ultraviolet-visible (UV-Vis) spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11:18, the intensity of ZN2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm. Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80 % in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7:18. Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18. |
| Author | Ying Xu Lin-Yan Hou Xiao-Meng Zhang |
| AuthorAffiliation | Zhang Hebei Province Key Laboratory of Inorganic Nonmetallic Materials, Materials Science and Engineering College, North China University of Science and Technology, Tangshan 063009, China |
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| CitedBy_id | crossref_primary_10_1016_j_vacuum_2021_110788 crossref_primary_10_1007_s42452_020_1971_5 crossref_primary_10_1016_j_vacuum_2023_112560 crossref_primary_10_1039_D3RA05481K crossref_primary_10_1016_j_ceramint_2020_02_073 |
| Cites_doi | 10.1088/0022-3735/9/11/032 10.1016/j.mejo.2008.09.003 10.1039/c1jm12227d 10.1016/j.cap.2012.05.014 10.1016/j.tsf.2009.02.109 10.1088/0022-3735/16/12/023 10.1016/j.tsf.2007.12.118 10.1016/j.vacuum.2004.01.033 10.1016/j.jcrysgro.2009.11.041 10.1016/j.tsf.2007.10.055 10.1142/S0218625X14500401 10.1016/j.tsf.2009.06.057 10.1007/s12598-013-0166-2 10.1016/j.apsusc.2007.03.036 10.1016/j.matlet.2004.07.023 10.1002/pssa.2211290116 10.1149/2.004205esl |
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| Copyright | The Nonferrous Metals Society of China and Springer-Verlag Berlin Heidelberg 2015 Rare Metals is a copyright of Springer, 2017. |
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| Keywords | Sn/Zn ratio Envelope method ZTO thin films MOCVD Optical properties |
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| Notes | Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18. Sn/Zn ratio; MOCVD; ZTO thin films;Envelope method; Optical properties 11-2112/TF ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
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| Snippet | Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic... Zinc tin oxide (ZTO) thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic... |
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| SubjectTerms | Biomaterials Chemistry and Materials Science Crystallization Energy Glass substrates Materials Engineering Materials Science Metallic Materials Metalorganic chemical vapor deposition MOCVD法 Nanoscale Science and Technology Optical properties Organic chemicals Physical Chemistry Raw materials Scanning electron microscopy Substrates Thin films Tin oxides Ultraviolet Wurtzite X-ray diffraction Zinc Zinc acetate Zinc oxide Zinc stannate 扫描电子显微镜 氧化物薄膜 紫外-可见分光光度计 紫外可见分光光度计 醋酸锌 金属有机化学气相沉积法 锡氧化物 |
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| Title | Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios |
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