Zinc tin oxide thin films prepared by MOCVD with different Sn/Zn ratios

• Published in: Rare metals Vol. 36; no. 9; pp. 753 - 757
• Main Authors: Xu, Ying, Hou, Lin-Yan, Zhang, Xiao-Meng
• Format: Journal Article
• Language: English
• Published: Beijing Nonferrous Metals Society of China 01.09.2017; Springer Nature B.V
• Subjects: Biomaterials; Chemistry and Materials Science; Crystallization; Energy; Glass substrates; Materials Engineering; Materials Science; Metallic Materials; Metalorganic chemical vapor deposition; MOCVD法; Nanoscale Science and Technology; Optical properties; Organic chemicals; Physical Chemistry; Raw materials; Scanning electron microscopy; Substrates; Thin films; Tin oxides; Ultraviolet; Wurtzite; X-ray diffraction; Zinc; Zinc acetate; Zinc oxide; Zinc stannate; 扫描电子显微镜; 氧化物薄膜; 紫外-可见分光光度计; 紫外可见分光光度计; 醋酸锌; 金属有机化学气相沉积法; 锡氧化物; Sn/Zn ratio; Envelope method; ZTO thin films; MOCVD; Optical properties
• ISSN: 1001-0521; 1867-7185
• DOI: 10.1007/s12598-015-0583-5

Zinc tin oxide（ZTO） thin films, with zinc acetate and tributyltin chloride as raw materials, were deposited on glass substrates by the method of metal organic chemical vapor deposition（MOCVD）. The crystallization, microstructure and optical properties were investigated by scanning electronic microscope（SEM）,X-ray diffraction（XRD） and ultraviolet-visible（UV-Vis）spectrophotometer. The results show that with the increase in Sn/Zn ratio, the crystal changes from wurtzite to rutile phase. When the ratio reaches 11：18,the intensity of Zn2SnO4 peaks appears to be the strongest and the optical band gap is about 3.27 eV. Calculated by the envelope method, the thickness of the ZTO thin films is 713.24 nm.Measured by UV-Vis spectrophotometer, the transmittance of the ZTO thin films reaches up to 80% in the wavelength range of 400-1000 nm when the Sn/Zn ratio is 7：18.