The research of device for measuring film thickness of intelligent coating machine

Ion beam sputtering machine uses computer to real time monitor the change of film thickness in the preparation process of soft X ray multilayer element fabrication. It solves the problems of uneven film thickness and too thick film thickness and so on, which exist in the original preparation process...

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Bibliographic Details
Published inMATEC Web of Conferences Vol. 34; p. 2008
Main Authors Wang, Wanjun, Quan, Ruihua, Tang, Guofeng, Ren, Lihua, Wang, Yu
Format Journal Article Conference Proceeding
LanguageEnglish
Published Les Ulis EDP Sciences 01.01.2015
Subjects
Error analysis
Film thickness
Frequency measurement
Graphical user interface
Ion beam sputtering
Measuring instruments
Multilayers
Signal delay
Soft x rays
Thickness measurement
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Summary:Ion beam sputtering machine uses computer to real time monitor the change of film thickness in the preparation process of soft X ray multilayer element fabrication. It solves the problems of uneven film thickness and too thick film thickness and so on, which exist in the original preparation process. The high-precision quartz crystal converts film thickness measurement into frequency measurement. The equal precision frequency meter based on FPGA measures the frequency. It can reduce the signal delay and interference signal of discrete components, accordingly improving the accuracy of measurement. Then it sents the count value to the host computer through the single chip microcomputer serial port. It calculates and displays the value by the GUI of LabVIEW. The experimental results show that, the relative measurement error can be decreased to 1/10, i.e., the measurement accuracy can be improved by more than ten times.
ISSN:2261-236X
2274-7214
2261-236X
DOI:10.1051/matecconf/20153402008