Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC

We report observation of nanostructures formed on thin TiN and DLC films that were irradiated by 800- and 267-nm, femtosecond (fs) Ti:sapphire laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly polarized fs pulses produce arrays o...

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Bibliographic Details
Published inApplied physics. A, Materials science & processing Vol. 76; no. 6; pp. 983 - 985
Main Authors Yasumaru, N., Miyazaki, K., Kiuchi, J.
Format Journal Article
LanguageEnglish
Published 01.04.2003
Subjects
Ablation
Arrays
Diamond-like carbon films
Lasers
Materials science
Nanostructure
Titanium nitride
Wavelengths
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Summary:We report observation of nanostructures formed on thin TiN and DLC films that were irradiated by 800- and 267-nm, femtosecond (fs) Ti:sapphire laser pulses at an energy fluence slightly above the ablation threshold. On the ablated thin-film surfaces, the linearly polarized fs pulses produce arrays of fine periodic structures that are almost oriented to the direction perpendicular to the laser polarization, while the circularly polarized light forms fine-dot structures. The size of these surface structures is 1/10--1/5 of the laser wavelength and decreases with a decrease in the laser wavelength.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0947-8396
1432-0630
DOI:10.1007/s00339-002-1979-2