Microflow devices and systems

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Bibliographic Details
Published inJournal of micromechanics and microengineering Vol. 4; no. 4; pp. 157 - 171
Main Authors Shoji, S, Esashi, M
Format Journal Article
LanguageEnglish
Published Bristol IOP Publishing 01.12.1994
Institute of Physics
Subjects
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
Microsensor
Active system
Flow(fluid)
Review
Microelectronics
Micromachine
Monitoring control system
Micropump
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More Information
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/4/4/001