Self-forming AlOx layer as Cu diffusion barrier on porous low-k film
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Published in | Thin solid films Vol. 518; no. 6; pp. 1648 - 1652 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
Amsterdam
Elsevier
2010
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Subjects | |
Online Access | Get full text |
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ISSN: | 0040-6090 1879-2731 |
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DOI: | 10.1016/j.tsf.2009.11.075 |