A method of reducing the windage power loss in a laser scanner motor using spiral-groove aerodynamic thrust bearings functioning as a viscous vacuum pump

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Bibliographic Details
Published inMicrosystem technologies Vol. 13; no. 8-10; pp. 1123 - 1130
Main Authors YOSHIMOTO, Shigeka, MIYATAKE, Masaaki, IWASA, Tomoatsu, TAKAHASHI, Akiyoshi
Format Conference Proceeding Journal Article
LanguageEnglish
Published Berlin Springer 01.05.2007
Subjects
Applied sciences
Bearings, bushings, rolling bearings
Drives
Electronics
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Rotating mirror
Scanner
Load capacity
Laser pumping
Shaft
Spiral groove bearing
Mechanical clearance
Gas bearing
Vacuum pump
Modeling
Thrust
Hydraulic pump
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ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-006-0327-4