Method for controlling energy density for reliable pulsed laser deposition of thin films
We have established a methodology to stabilize the laser energy density on a target surface in pulsed laser deposition of thin films. To control the focused laser spot on a target, we have imaged a defined aperture in the beamline (so called image-focus) instead of focusing the beam on a target base...
Saved in:
Published in | Review of scientific instruments Vol. 85; no. 2; p. 025111 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
United States
01.02.2014
|
Online Access | Get more information |
Cover
Loading…
Be the first to leave a comment!