Method for controlling energy density for reliable pulsed laser deposition of thin films
We have established a methodology to stabilize the laser energy density on a target surface in pulsed laser deposition of thin films. To control the focused laser spot on a target, we have imaged a defined aperture in the beamline (so called image-focus) instead of focusing the beam on a target base...
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| Published in | Review of scientific instruments Vol. 85; no. 2; p. 025111 |
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| Main Authors | , , |
| Format | Journal Article |
| Language | English |
| Published |
United States
01.02.2014
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| Online Access | Get more information |
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| Summary: | We have established a methodology to stabilize the laser energy density on a target surface in pulsed laser deposition of thin films. To control the focused laser spot on a target, we have imaged a defined aperture in the beamline (so called image-focus) instead of focusing the beam on a target based on a simple "lens-focus." To control the laser energy density on a target, we have introduced a continuously variable attenuator between the output of the laser and the imaged aperture to manipulate the energy to a desired level by running the laser in a "constant voltage" mode to eliminate changes in the lasers' beam dimensions. This methodology leads to much better controllability/reproducibility for reliable pulsed laser deposition of high performance electronic thin films. |
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| ISSN: | 1089-7623 |
| DOI: | 10.1063/1.4865716 |