A low-cost high-performance cleanroom enclosure

A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a...

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Bibliographic Details
Published inIEEE transactions on education Vol. 42; no. 2; pp. 144 - 146
Main Authors Hutchins, J.B., Martin, M.D., Belolipetskiy, S., Cox, H.L., Pitts, W.K., Walsh, K.M.
Format Journal Article
LanguageEnglish
Published IEEE 01.05.1999
Subjects
Cleanrooms
Conversion
Costs
Education
Enclosure
Lasers
Micromachining
Modular
Tables (data)
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Summary:A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a comparable commercial modular cleanroom, sufficiently inexpensive for the development of microfabrication instructional laboratories.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0018-9359
1557-9638
DOI:10.1109/13.762951