Protection of Kapton from atomic oxygen attack by SiOx/NiCr coating

SiOx/NiCr coatings with different SiOx thicknesses were deposited by the combination of ion implantation (IIP), filter cathode vacuum arc (FCVA), and electron beam (E-beam) evaporation methods to protect flexible Kapton from atomic oxygen (AO) attack. Due to the ion stitching effect and mechanical i...

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Bibliographic Details
Published inSurface & coatings technology Vol. 423; p. 127582
Main Authors Zhang, Y.F., Chen, S.N., Yan, W.Q., Li, Q., Chen, L., Ou, Y.X., Liao, B.
Format Journal Article
LanguageEnglish
Published Lausanne Elsevier B.V 15.10.2021
Elsevier BV
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Summary:SiOx/NiCr coatings with different SiOx thicknesses were deposited by the combination of ion implantation (IIP), filter cathode vacuum arc (FCVA), and electron beam (E-beam) evaporation methods to protect flexible Kapton from atomic oxygen (AO) attack. Due to the ion stitching effect and mechanical interlocking of implanted Ni+, the ductility and supporting effect of the fcc γ (Ni-Cr) alloy layer, and the low growth stress of the SiOx, the SiOx/NiCr coatings showed high adhesion and toughness. Exposure tests indicated that the AO erosion yield of the 1 μm-thick SiOx/NiCr-coated Kapton was 5.6 × 10−26 cm3 atom−1, which was attributed to the formation of a compact and continuous thin SiO2 layer. In addition, the inherent kinetic energy and oxidation performance dissipation of AO on the thick inner walls of cracks helped to reduce the cavity cross-sectional area and maximum width in the matrix. [Display omitted] •Successfully deposited SiOx/NiCr coatings on Kapton via IIP, FCVA and E-beam evaporation methods.•Excellent adhesion and toughness were achieved through a gradient structure.•AO erosion yield of the 1 μm-thick SiOx/NiCr-coated Kapton was 1.53% of that of Kapton.•The formation of SiO2 layer resulted in its enhanced AO erosion resistance.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2021.127582