A Low-Voltage and High Uniformity Nano-Electro-Mechanical System Tunable Color Filter Based on Subwavelength Grating

This paper reports on the construction of a nano-electro-mechanical system (NEMS) tunable color filter based on a subwavelength grating with high color uniformity and a low drive voltage. We recently proposed a ground-voltage-ground (GVG)-type tunable color filter with a parallel-plate actuator with...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 51; no. 11; pp. 11PA01 - 11PA01-4
Main Authors Honma, Hiroaki, Takahashi, Kazuhiro, Ishida, Makoto, Sawada, Kazuaki
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.11.2012
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Summary:This paper reports on the construction of a nano-electro-mechanical system (NEMS) tunable color filter based on a subwavelength grating with high color uniformity and a low drive voltage. We recently proposed a ground-voltage-ground (GVG)-type tunable color filter with a parallel-plate actuator with three pairs of electrodes to decrease the crosstalk due to the electrostatic attractive force between each pair of actuators. Our finite element method (FEM) simulation results indicate that the drive voltage is decreased by 10 V, as compared to that of the previously reported GV type. The proposed structure was fabricated using a silicon-on-insulator (SOI) wafer. The color tuning capability of the device was demonstrated by applying a drive voltage of 6.7 V. The reflected light intensity was decreased by 34% at a wavelength of 680 nm. Color uniformity was also obtained in the filter area by reducing the variation of the displacement on the one-dimensional actuator arrays.
Bibliography:Schematic structure of GV-type NEMS tunable color filter based on subwavelength grating. Schematic structure of GVG-type NEMS tunable color filter. FEM analysis of stiffness of grating reflector part as a function of the ratio of suspension width to reflector width. Beam deformation of the 1D array for (a) GV- and (b) GVG-type electrostatic actuators. Displacement of the movable electrode as a function of applied voltage. Calculated reflection spectrum of GVG-type NEMS tunable color filter using the RCWA method. Fabrication process overview of GVG-type NEMS tunable color filter. (a) SEM image of fabricated GVG-type NEMS tunable color filter and (b) close-up view of the boundary of the filter area. Reflection spectrum of the GVG-type NEMS tunable color filter. (Color) Optical micrographs of the color filter in motion for the (a) GV- and (b) GVG-type filters.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.51.11PA01