A fast insight into the nonlinear oscillation of nano-electro-mechanical resonators considering the size effect and the van der Waals force

• Published in: Europhysics letters Vol. 139; no. 2; pp. 23001 - 23004
• Main Author: Wang, Kang-Jia
• Format: Journal Article
• Language: English
• Published: Les Ulis EDP Sciences, IOP Publishing and Società Italiana di Fisica 01.07.2022; IOP Publishing
• Subjects: Inverse method; Microactuators; Nanoelectromechanical systems; Partial differential equations; Resonators; Size effects; Van der Waals forces
• ISSN: 0295-5075; 1286-4854
• DOI: 10.1209/0295-5075/ac3cd4

Nano/micro actuators are widely used in micro/nano-electro-mechanical systems (NEMS/MEMS) and the study on their nonlinear oscillation is of great significance. This paper begins with a wrong variational principle (Ghalambaz M., Appl. Nanosci ., 6 (2016) 309) of the reduced governing partial differential equation of the resonator which is used to describe the nonlinear oscillation of nano-electro-mechanical resonators that takes into account the size effect and the van der Waals force. By using the semi-inverse method,the we establish the genuine variational principle. Then a simple method, the so-called He's frequency formulation, is applied to solve the problem, where only one step is needed to get the approximate amplitude-frequency relationship. Comparing with the existing method, we show that the proposed method is simple but effective, which is helpful for the study of the nonlinear oscillation in micro/nano-electro-mechanical systems.