Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators

• Published in: Journal of microelectromechanical systems Vol. 30; no. 6; pp. 885 - 896
• Main Authors: Zeng, Yaxiang, Groenesteijn, Jarno, Alveringh, Dennis, Wiegerink, Remco J., Lotters, Joost C.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.12.2021; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Actuation; capacitive readout; Coriolis mass flow sensor; density compensation; Design optimization; Diameters; Fluid flow measurement; fluid-structure interaction; Lead zirconate titanates; Mass flow; piezoelectric actuator; Piezoelectric actuators; PZT; Sensitivity; Sensors; Silicon nitride; Thin films
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/JMEMS.2021.3107744

A micro Coriolis flow sensor accurately measures small mass flows without being affected by properties of the fluid. This paper presents a micro Coriolis mass flow sensor driven by PZT thin film piezoelectric actuators, which allows a combination of large actuation force, low power dissipation and virtually no self-heating. The sensor was fabricated using surface channel technology, resulting in a tube diameter of 40<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> and a thin silicon-rich silicon nitride tube wall of 1.2<inline-formula> <tex-math notation="LaTeX">\mu \text{m} </tex-math></inline-formula> thick, with a few additional steps to form the integrated piezoelectric actuators. The integrated actuators can actuate the sensor into both swing mode and twist mode. Both actuation modes were evaluated for different fluids and the results are presented in this paper. In the case of swing mode actuation, an optical readout was used to detect the resulting Coriolis movement, resulting in a relatively low sensitivity. In the case of twist mode actuation, a capacitive readout was used and, in comparison to previously published devices, a high mass flow sensitivity was achieved thanks to an optimized readout design. The measurement results show the read-out noise has a standard deviation of 0.15% of the full scale of 1.8 gh −1 when actuated in the twist mode. [2020-0392]