Applications of non evaporable getter pump in vacuum metrology

• Published in: Vacuum Vol. 85; no. 7; pp. 739 - 743
• Main Authors: Detian, Li, Yongjun, Cheng
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 21.01.2011
• Subjects: Calibration; Conductance; Division; Extension of calibration lower limit; Feasibility; Gettering; High vacuum; Metrology; Non evaporable getter pump; Pumps; Vacuum metrology; Extension of calibration lower limit; Vacuum metrology; Non evaporable getter pump
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2010.11.008

Applications of non evaporable getter pump in vacuum metrology are reviewed and discussed with a special focus on static expansion primary vacuum standard, and flow division method ultra-high vacuum (UHV) and extremely high vacuum (XHV) standard. The results obtained show that the non evaporable getter pump is suited for extending the calibration lower limit, and it is a valuable supplement to the basic methods. The feasibility of use of non evaporable getter pump in constant conductance method vacuum leak standard is also discussed. ► The ultimate pressure of 7.9 × 10-10 Pa was generated by the combination of turbomolecular pump and NEG pump. ► The lower limit of the static expansion vacuum standard can be extended to 10−7 Pa by using the NEG pump when an inert gas is used as the test gas. ► The lower limit of the constant conductance method vacuum leak standard is hopeful to be extended to less than 10−10 Pa m3/s in the same way.