Investigation of structure and mechanical properties of plasma vapor deposited nanocomposite TiBN films

TiBN coatings have huge potential applications as they have excellent properties with increasing modem industrial requirements.Nanocomposite TiBN coatings were synthesized on cemented carbide,high speed steel and Si substrates by using cathodic arc plasma ion plating from pure TiB2 ceramic targets.T...

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Published inPlasma science & technology Vol. 19; no. 4; pp. 76 - 84
Main Author 韩滨 D NEENA 王泽松 K K KONDAMAREDDY 李娜 左文彬 闫少健 刘传胜 付德君
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2017
Subjects
HRTEM
nanocomposite
RBS
TiBN
tribological properties
力学性能
卢瑟福背散射
气相沉积
电影
等离子
纳米晶体
结构
阴极电弧离子镀
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ISSN1009-0630
1009-0630
DOI10.1088/2058-6272/aa57eb

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Summary:TiBN coatings have huge potential applications as they have excellent properties with increasing modem industrial requirements.Nanocomposite TiBN coatings were synthesized on cemented carbide,high speed steel and Si substrates by using cathodic arc plasma ion plating from pure TiB2 ceramic targets.The structure and mechanical properties of the TiBN coatings were significantly influenced by the nitrogen partial pressure.Rutherford backscattering spectrometry demonstrates that the nitrogen content of the coating varied from 2.8% to 34.5% and highresolution electron microscopy images reveal that all coatings have the characteristic of nanocrystals embedded in an amorphous matrix.The root-mean-square roughness of the coatings increases from 3.73 to 14.64 nm and the coefficients of friction of the coatings at room temperature vary from 0.54 to 0.73 with increasing nitrogen partial pressure.The microhardness of the coating increases up to 35.7 GPa at 10 sccm N2 flow rate.The smallest wear rate is 2.65 ×10^-15m^3N^-1m^-1 which indicates that TiBN coatings have excellent wear resistance.The adhesion test revealed that the TiBN coatings have good adhesion at low nitrogen partial pressure.
Bibliography:Bin HAN, D NEENA, Zesong WANG, K K KONDAMAREDDY, Na LI, Wenbin ZUO, Shaojian YAN, Chuansheng LIU and Dejun FU（School of Physics and Technology and Key Laboratory of Artificial Micro-and Nano-Materials of Ministry of Education, Hubei Nuclear Solid Physics Key Laboratory, Wuhan University, Wuhan 430072, People＇s Republic of China）
TiBN, nanocomposite, RBS, tribological properties, HRTEM
TiBN coatings have huge potential applications as they have excellent properties with increasing modem industrial requirements.Nanocomposite TiBN coatings were synthesized on cemented carbide,high speed steel and Si substrates by using cathodic arc plasma ion plating from pure TiB2 ceramic targets.The structure and mechanical properties of the TiBN coatings were significantly influenced by the nitrogen partial pressure.Rutherford backscattering spectrometry demonstrates that the nitrogen content of the coating varied from 2.8% to 34.5% and highresolution electron microscopy images reveal that all coatings have the characteristic of nanocrystals embedded in an amorphous matrix.The root-mean-square roughness of the coatings increases from 3.73 to 14.64 nm and the coefficients of friction of the coatings at room temperature vary from 0.54 to 0.73 with increasing nitrogen partial pressure.The microhardness of the coating increases up to 35.7 GPa at 10 sccm N2 flow rate.The smallest wear rate is 2.65 ×10^-15m^3N^-1m^-1 which indicates that TiBN coatings have excellent wear resistance.The adhesion test revealed that the TiBN coatings have good adhesion at low nitrogen partial pressure.
34-1187/TL
PST-2016-0264.R3
Institute of Plasma Physics
ISSN:1009-0630
1009-0630
DOI:10.1088/2058-6272/aa57eb