An Innovative Straight Resonator Incorporating a Vertical Slot as an Efficient Bio-Chemical Sensor
A compact and integrated label-free refractometric bio-chemical sensor based on silicon-on-insulator (SOI) is proposed and comprehensively studied at the telecommunication wavelength of λ = 1550 nm. This device incorporated a three-dimensional (3D) Fabry-Perot cavity in the nano-scale regime with ma...
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Published in | IEEE journal of selected topics in quantum electronics Vol. 23; no. 2; pp. 132 - 139 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
New York
IEEE
01.03.2017
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subjects | |
Online Access | Get full text |
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Summary: | A compact and integrated label-free refractometric bio-chemical sensor based on silicon-on-insulator (SOI) is proposed and comprehensively studied at the telecommunication wavelength of λ = 1550 nm. This device incorporated a three-dimensional (3D) Fabry-Perot cavity in the nano-scale regime with maximum footprint area around 470 × 473 nm 2 . A resonance shift (Δλ res ) of 5.2 nm is reported for an ultrathin (5 nm) bio-layer sensing. Besides, an improved maximum sensitivity (S = 820 nm/RIU) is also achieved for bulk refractive index change in surroundings. As a chemical sensor, very low detection limit (DL = 6.1 × 10 -6 RIU) also can be possible to achieve by this device. All the numerical investigations and optimizations were carried out in frequency domain by a numerically efficient and rigorous full vectorial H-field based 2-D and 3-D finite element methods (FEM). A 3D-FEM code is developed and used to find out the wavelength dependencies of the resonator. Possibility of easy CMOS fabrication and integration opportunities make this structure as a prospective and efficient lab-on-chip device. |
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ISSN: | 1077-260X 1558-4542 |
DOI: | 10.1109/JSTQE.2016.2630299 |