Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam

• Published in: Review of scientific instruments Vol. 81; no. 7; p. 073710
• Main Authors: Liese, Tobias, Radisch, Volker, Krebs, Hans-Ulrich
• Format: Journal Article
• Language: English
• Published: United States 01.07.2010
• ISSN: 1089-7623
• DOI: 10.1063/1.3462985

X-ray diffractive techniques using Fresnel zone plate lenses of various forms are of great technical interest because of their ability to form images at very high spatial resolution, but the zone plates are unfortunately very hard to produce by lithography. Alternatively, multilayer Laue lenses (MLLs) and multilayer zone plates are used due to the higher and easily adjustable aspect ratio necessary for different wavelengths. In this paper, the fabrication of a MLL by a combination of pulsed laser deposition and focused ion beam machining is described. All steps of the production of a Ti/ZrO(2) microlens test structure with focal length of 220 microm (for a wavelength of 2.88 nm in the "water window" regime) are explained in detail. It is shown that this combination of two powerful techniques is very effective for the fabrication of MLL. All steps can be done in a very precise and controlled way without introducing damage to the grown multilayer structures.