Operation of a compact electron cyclotron resonance source for the growth of gallium nitride by molecular beam epitaxy (ECR-MBE)
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Published in | Journal of electronic materials Vol. 24; no. 4; pp. 275 - 281 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
01.04.1995
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Online Access | Get full text |
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ISSN: | 0361-5235 1543-186X |
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DOI: | 10.1007/BF02659687 |