Operation of a compact electron cyclotron resonance source for the growth of gallium nitride by molecular beam epitaxy (ECR-MBE)

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Bibliographic Details
Published inJournal of electronic materials Vol. 24; no. 4; pp. 275 - 281
Main Authors Molnar, R. J., Singh, R., Moustakas, T. D.
Format Journal Article
LanguageEnglish
Published 01.04.1995
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ISSN:0361-5235
1543-186X
DOI:10.1007/BF02659687