Mathematical model of sapphire micromachining by CVD diamond coating tool

A CVD diamond coating tool with prismatic crystal structure was prepared by hot filament chemical vapor deposition (HFCVD) method to improve sapphire's lapping efficiency. The full plastic removal model of Sapphire (0001) plane is established based on the extended domain removal theory of hard...

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Bibliographic Details
Published inIntegrated ferroelectrics Vol. 200; no. 1; pp. 134 - 142
Main Authors Wanshan, Tian, Shouxin, Yu, Jing, Pang, Wei, Liu, Dunwen, Zuo, Wenzhuang, Lu
Format Journal Article
LanguageEnglish
Published Philadelphia Taylor & Francis 24.07.2019
Taylor & Francis Ltd
Subjects
Brittle materials
Chemical vapor deposition
Coating
Crystal structure
CVD diamond coating tool
Diamond films
Diamond tools
full plastic removal
lapping
Material properties
material removal rate
Material removal rate (machining)
Mathematical models
Micromachining
Organic chemistry
Sapphire
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Summary:A CVD diamond coating tool with prismatic crystal structure was prepared by hot filament chemical vapor deposition (HFCVD) method to improve sapphire's lapping efficiency. The full plastic removal model of Sapphire (0001) plane is established based on the extended domain removal theory of hard and brittle materials such as sapphires. This model is used to analyze the effect of parameters such as prismatic particle's size of the CVD diamond coating, lapping rate, lapping pressure, and material properties on the removal rate during the lapping process, and to predict the material removal rate, which lays the foundation for the high-efficiency micromachining of sapphire.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584587.2019.1592630