Fabrication of CVD duplicate diamond microgear

CVD diamond is an ideal processing material which is suitable for the Micro-Electro-Mechanical System parts, such as microgears, for its excellent performance. In this article, the masks for duplicate diamond microgear deposition have been etching through ICP technology. Meanwhile, the duplicate dia...

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Bibliographic Details
Published inIntegrated ferroelectrics Vol. 182; no. 1; pp. 104 - 109
Main Authors Wei, Liu, Wenzhuang, Lu, Hongjun, Wang, Jing, Pang
Format Journal Article
LanguageEnglish
Published Philadelphia Taylor & Francis 24.07.2017
Taylor & Francis Ltd
Subjects
Chemical vapor deposition
CVD diamond
Diamonds
duplicate
error analysis
Gears
Masks
microgear
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Summary:CVD diamond is an ideal processing material which is suitable for the Micro-Electro-Mechanical System parts, such as microgears, for its excellent performance. In this article, the masks for duplicate diamond microgear deposition have been etching through ICP technology. Meanwhile, the duplicate diamond microgears with teeth number of 20 and 14 were deposited in the corresponding silicon mold cavity by HFCVD method. The gears were fabricated successfully and analyzed by SEM and metalloscope. The result shows that the ICP-CVD process is able to fabricate duplicate diamond microgears in batches with flat surface, high shape and size consistency and position accuracy.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584587.2017.1352364