Bottom up fabrication of a nickel–lead zirconate titanate piezoelectric microcantilevers

Proof of concept for the novel bottom up manufacture of a piezoelectric microelectromechanical system cantilever demonstrator is presented. Cantilever structures, consisting of 10 µm lead zirconate titanate (PZT) and 21 µm nickel, were fabricated by electroforming Ni structures on top of PZT films,...

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Bibliographic Details
Published inMaterials letters Vol. 63; no. 1; pp. 88 - 90
Main Authors Rocks, S.A., Tredez, Q., Almond, H.J., Shaw, C.P., Dorey, R.A.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 15.01.2009
Subjects
Electroforming
MEMS
Piezoelectric materials
Sol–gel preparation
Thick films
Sol–gel preparation
MEMS
Piezoelectric materials
Electroforming
Thick films
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Summary:Proof of concept for the novel bottom up manufacture of a piezoelectric microelectromechanical system cantilever demonstrator is presented. Cantilever structures, consisting of 10 µm lead zirconate titanate (PZT) and 21 µm nickel, were fabricated by electroforming Ni structures on top of PZT films, subsequently patterning the PZT and removing the temporary sacrificial silicon support structure. Following release the cantilevers exhibited minimal bending indicating low levels of internal stress. The resonant frequency was calculated to be 33.2 +/− 2 kHz, which is in agreement with that of 33.8 kHz measured using an impedance analyzer and 33.9 kHz measured using the mechanical vibration method.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2008.09.011