Carbon nano-particles prepared by ion-clustering in plasma

• Published in: Vacuum Vol. 71; no. 1; pp. 171 - 176
• Main Authors: Pócsik, I., Veres, M., Füle, M., Koós, M., Kokavecz, J., Tóth, Z., Radnóczi, G.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Oxford Elsevier Ltd 09.05.2003; Elsevier
• Subjects: Clustering; Cross-disciplinary physics: materials science; rheology; Dusty plasma; Exact sciences and technology; Hydrogenated amorphous carbon; Materials science; Nano-particles; Nanoscale materials and structures: fabrication and characterization; Physics; Dusty plasma; Hydrogenated amorphous carbon; Clustering; Nano-particles; Dusty plasmas; Experimental study; Carbon; CVD; Growth from vapor; Nanoparticles; Nonmetals; Amorphous hydrogenated material; Preparation; Growth mechanism; PECVD; Nanostructured materials; Atomic clusters
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/S0042-207X(02)00733-9

The plasma-assisted chemical vapour deposition technique was used to produce carbon nano-particles in a dusty plasma condition, at increased gas pressure and decreased electric field. The negatively biased upper electrode levitates the forming carbon clusters, which grow in a spherical symmetrical way in the relatively large density of the ions of the plasma. The spheres also attach to each other, but their concentration and mobility being low, the aggregation results in a different structure: a necklace-type chain will be formed. The dust particles, leaving the plasma cover the chamber wall, but a substantial amount of them reach the electrically driven substrate; forming an amorphous carbon film. The cluster systems were investigated by transmission electron microscopy, atomic force microscopy, Raman, infrared and photoluminescence spectroscopic methods.