Combinatorial study of reactively sputtered Cr–Ti–N

A combinatorial study of ternary Cr–Ti–N libraries is reported. Sixteen libraries were grown with a range of metallic composition gradients and different nitrogen contents. X-ray photoelectron spectroscopy (XPS) and electron microprobe analysis (EPMA) show that these libraries encompass a large port...

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Bibliographic Details
Published inApplied surface science Vol. 223; no. 1; pp. 253 - 258
Main Authors Teplin, C.W., van Hest, M.F.A.M., Dabney, M., Perkins, C.L., Gedvillas, L.M., To, B., Parilla, P.A., Keyes, B.M., Perkins, J.D., Ginley, D.S., Lin, Yuping, Lu, Yiwei
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 15.02.2004
Elsevier Science
Subjects
Combinatorial
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Condensed matter: structure, mechanical and thermal properties
CrN
Cross-disciplinary physics: materials science; rheology
dc sputtering
Exact sciences and technology
Physics
TiN
TiN
Combinatorial
CrN
dc sputtering
Inorganic compounds
Transition element compounds
Nitrogen
Sputtering
Reflectivity
Quantity ratio
Near ultraviolet radiation
Electron microprobe analysis
Absorption spectra
Optical reflection
Phase space
X-ray photoelectron spectra
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Summary:A combinatorial study of ternary Cr–Ti–N libraries is reported. Sixteen libraries were grown with a range of metallic composition gradients and different nitrogen contents. X-ray photoelectron spectroscopy (XPS) and electron microprobe analysis (EPMA) show that these libraries encompass a large portion of the ternary phase space. Optical transmission and reflection measurements from near ultra-violet to infra-red wavelengths suggest that both the color and infra-red reflectivity can be optimized for this ternary system.
ISSN:0169-4332
1873-5584
DOI:10.1016/S0169-4332(03)00927-9