Fabrication of 10-nm-scale nanoconstrictions in graphene using atomic force microscopy-based local anodic oxidation lithography

We performed local anodic oxidation (LAO) lithography on monolayer graphene and highly oriented pyrolytic graphite (HOPG) using atomic force microscope (AFM). Auger electron spectroscopic measurements in the oxidized area formed on the HOPG revealed that the number of oxygen atoms systematically inc...

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 54; no. 4S; pp. 4 - 1-04DJ06-4
Main Authors Arai, Miho, Masubuchi, Satoru, Nose, Kenji, Mitsuda, Yoshitaka, Machida, Tomoki
Format Journal Article
LanguageEnglish
Published The Japan Society of Applied Physics 01.04.2015
Subjects
Anodizing
Atomic force microscopy
Channels
Graphene
Lithography
Monolayers
Nanostructure
Voltage
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Summary:We performed local anodic oxidation (LAO) lithography on monolayer graphene and highly oriented pyrolytic graphite (HOPG) using atomic force microscope (AFM). Auger electron spectroscopic measurements in the oxidized area formed on the HOPG revealed that the number of oxygen atoms systematically increased with the bias voltage applied to the AFM cantilever |Vtip|, which demonstrates the tunability of the extent of oxidation with |Vtip|. By optimizing the LAO conditions, we fabricated monolayer graphene nanoconstrictions with a channel width as small as 10 nm, which is the smallest graphene nanoconstriction so far achieved by utilizing AFM lithography techniques.
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.54.04DJ06