Effect of dopants (F, Si) material on the structure and properties of hydrogenated DLC film by plane cathode PECVD

• Published in: Diamond and related materials Vol. 110; p. 108102
• Main Authors: Wei, Xubing, Chen, Lin, Zhang, Minglan, Lu, Zhibin, Zhang, Guangan
• Format: Journal Article
• Language: English
• Published: Amsterdam Elsevier B.V 01.12.2020; Elsevier BV
• Subjects: Cathodes; Coefficient of friction; Corrosion; Corrosion resistance; Diamond-like carbon films; DLC films; Doping; Friction; Friction reduction; Hydrogenation; Mechanical performance; Mechanical properties; Plasma enhanced chemical vapor deposition; Tribology; Wear resistance; DLC films; Corrosion; Mechanical performance; Tribology
• ISSN: 0925-9635; 1879-0062
• DOI: 10.1016/j.diamond.2020.108102

DLC film is widely used in industry and the DLC films with the doping of different element exhibit relatively large differences of their structures and properties. Thus, it is extremely essential to understand clearly the structure and property of the each DLC film for its application. The Si (Si&H-DLC), F (F&H-DLC), F and Si (F&Si&H-DLC) doped hydrogenated DLC (H-DLC) film were deposited by the plane cathode plasma enhanced chemical vapor deposition to study its differences. Results have shown that the doping of Si element is beneficial to increase the sp3-C fraction and the hydrogen content of the H-DLC film, and the doping of F element increase the sp2-C clusters. Besides, the H-DLC film possesses the best mechanical properties and wear resistance, however, it exhibits the highest friction coefficient. The friction coefficients of the F&Si&H-DLC and Si&H-DLC films are very low, exhibiting that the doping of Si element can greatly reduce the friction coefficient of the H-DLC film. In addition, compared with the Si&H-DLC and F&H-DLC film, the F&Si&H-DLC film possesses the better corrosion resistance, which is related to the highest hydrogen content. Consequently, this study can help us choose suitable DLC films for different industrial environments. [Display omitted] •Si element contributes to the formation of more sp3-C content in the H-DLC film, while F element results in a slight increase of sp2 clusters.•The H-DLC film possesses the best mechanical properties and the F&Si&H-DLC film exhibits the poorest mechanical properties.•The F&Si&H-DLC film exhibits the best corrosion resistance.•The doping of Si and F elements greatly reduces the friction coefficient of H-DLC film, among which Si element plays a more obvious role.•This study will be of guiding significance to their application in industry.