Corrosion on silicon sensors

The CMS tracking detector uses about 26 000 silicon sensors to equip 206 m 2 of silicon [F. Hartmann, et al., Nucl. Instr. and Meth. A 478 (2002); J.L. Agram, et al., Nucl. Instr. and Meth. A 517 (2004) 77]. During our quality and process control, including long term testing of the silicon sensors,...

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Bibliographic Details
Published inNuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 569; no. 1; pp. 80 - 83
Main Authors Hartmann, F., Bergauer, T., Fontaine, J.C., Frey, M., Furgeri, A., Krammer, M.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 10.12.2006
Subjects
Aluminum oxide
CMS
Corrosion
ESEM
Silicon sensor
CMS
Silicon sensor
Corrosion
ESEM
29.40.Wk
Aluminum oxide
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Summary:The CMS tracking detector uses about 26 000 silicon sensors to equip 206 m 2 of silicon [F. Hartmann, et al., Nucl. Instr. and Meth. A 478 (2002); J.L. Agram, et al., Nucl. Instr. and Meth. A 517 (2004) 77]. During our quality and process control, including long term testing of the silicon sensors, strange stains on the guard and bias rings have been observed. The result of a systematic investigation proved that our detectors are affected by Al 2 O 3 corrosion after time under voltage in a humid environment. Depth profiling showed that the metal structures are compromised down to the level of SiO 2 . Finally, significant concentrations of potassium (K) were found precisely at the location of the corrosion, serving as a catalyst for the electrochemical reaction. A systematic study and origin of these stains will be presented.
ISSN:0168-9002
1872-9576
DOI:10.1016/j.nima.2006.09.078